Hexamethyldisilazane丨CAS 999-97-3

Hexamethyldisilazane丨CAS 999-97-3
Product Introduction:
Catalog No.: SS089934
CAS No.: 999-97-3
Purity: 99% min.
Product Name: Hexamethyldisilazane
Certificate: REACH
Molecular Formula: C6H19NSi2
Molecular Weight: 161.39
Synonym(s): 1,1,1,3,3,3-Hexamethyldisilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine; Hexamethyl disilizane; HMDS
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Technical Parameters
Description

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Specifications

 

Appearance: Colorless, transparent liquid
Purity: 99% min
Hexamethyldisiloxane: 0.5% max
Trimethylsilanol: 0.2% max
Others: 0.3% max
Chlorion (Cl⁻): 15 ppm max

 

Transport Information

 

Parameter

Specification

UN Number

1992

Class

3(6.1)

Packing Group

II

H.S. Code

2931900090999

Stability & Reactivity

The product is chemically stable under standard ambient conditions.

Storage

Tightly closed. Store in a closed, dry, ventilated place

Condition to Avoid

 

Package

 

 

Manufacturing Information

 

Parameter

Specification

Capacity

300MT/month

Frequency

 

Main Export Countries

 

Capacity/Batch

 

Experience

Production since 2001

Stock

 

 

 

 

Applications

 

1. Surface Treatment (Hydrophobic Coating)

Used to render glass, silica, and semiconductor surfaces hydrophobic.

Commonly applied in photolithography as a priming agent to improve photoresist adhesion on silicon wafers.

2. Silylation Reagent in Organic Synthesis

Converts active hydrogen-containing compounds (e.g., alcohols, amines, acids) into silyl ethers or amides, protecting functional groups during multi-step syntheses.

Widely used in gas chromatography (GC) sample preparation to make compounds more volatile and thermally stable.

3. Pharmaceutical & Fine Chemical Manufacturing

Acts as a protecting group reagent in the synthesis of active pharmaceutical ingredients (APIs).

Facilitates selective protection/deprotection strategies in complex molecule assembly.

4. Material Science and Electronics

Employed in semiconductor fabrication and microelectronic device production.

Used as a precursor or additive in producing organosilicon polymers and silicon-based coatings.

5. Catalyst and Intermediate

Can be used as a precursor for silicon-nitrogen compounds and other functional organosilicon derivatives.

Benefits

Effective Silylating Agent: Fast and efficient reaction with hydroxyl and amine groups.

Improves Adhesion: Enhances adhesion of photoresists and coatings to substrates.

Moisture Resistance: Produces hydrophobic surfaces, protecting against water ingress.

Volatile and Easy to Remove: Residual HMDS can be easily evaporated or decomposed.

Widely Compatible: Suitable for use in organic synthesis, microfabrication, and surface chemistry.

 

Conclusion

 

Hexamethyldisilazane (HMDS, CAS 999-97-3) is a key organosilicon reagent valued for its roles as a silylating agent, surface primer, and hydrophobic coating agent. It is indispensable in semiconductor processing, organic synthesis, and materials science due to its ability to modify surfaces and protect reactive groups. Its volatility and reactivity make it a powerful tool in both laboratory and industrial settings.

 

 

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